In the journal VAK Photonics "Technologies and technological equipment", volume 16, No. 2, 2022, our article "Development of plasma processing systems for micro and nanoelectronics products" was published
Plasma treatment is actively used in the manufacture of optical components in photonics and microelectronics products: cleaning the surface from contamination, reducing surface roughness, increasing surface energy and surface modification. The article presents information about the range of MPC plasma processing units developed by GN tech together with specialists of Bauman Moscow State Technical University. The emphasis is placed on an innovative development – an installation with a high-current bipolar pulse generator of low frequency, which provides an increased concentration of low-energy ions and a significantly lower process temperature for processing promising photonics and microelectronics products (polymer lenses, waveguides) sensitive to plasma.
The full text: https://www.photonics.su/journal/article/9263