Publications

To remove contamination, modify or activate (increase chemical activity) the surfaces of products from high—tech areas without damaging them - such tasks are designed to solve the development of the resident of the technopark "Polyus", the company GN Electronics. "The innovation of our installation is that we use a bipolar pulse generator developed by us to produce plasma. It creates short and frequent pulses, which allows you to increase the concentration of ions. Additionally, in the intervals between pulses, a relatively low negative voltage is applied to the electrodes to give the ions the minimum energy necessary for processing. This ensures careful and efficient processing of sensitive semiconductor and quantum structures without increasing the temperature of the product," said Denis Vasiliev, a leading engineer at GN Electronics.

The micro-sized processing of ceramic materials in the production of electronic devices is an important stage of the technological process. However, the tightening of requirements for the final products and their constant miniaturization imposes serious limitations on traditional methods of mechanical and laser processing. The article discusses the possibilities of the electron-beam processing method for ceramics. The results of experimental studies on the processing of sintered ceramics VK94-DN and LTCC KEKO SK-47 are presented.