Lithium niobate (LiNbO3– is one of the piezoelectric crystals. One of the important properties of this crystal is the high speed of propagation of the surface wave, which depends on the plane of the slice. It is thanks to him that it becomes possible to use lithium niobate for broadband devices.
Properties |
Conditions |
Units of measurement |
Crystal |
LiNbO3 |
|||
Size of wafer |
— |
" |
3 / 4 / 6 / 8 |
Orientation |
— |
— |
X / Z / Y41° / Y64° / Y128° / YZ / YX / по запросу |
Curie temperature |
— |
°C |
1142±3 |
Doped with |
— |
— |
Zn / MgO (single or double) |
Surface finish |
— |
— |
SSP / DSP |
Thickness |
— |
мм |
0,18 / 0,25 / 0,35 / 0,50 / 1,00+ по запросу |
TTV |
— |
мкм |
< 1~5 |
BOW |
— |
мкм |
±(25~40) |
Warp |
— |
мкм |
≤ 35 |
LTV |
5x5 mm |
мкм |
< 1,5 |
PLTV |
5x5 mm |
% |
≥98 |
Polished side |
Ra |
Å |
≤ 5 |
Back side criteria |
Ra |
мкм |
0,5 ~ 1,0 |
Electro-optical modulators
Acousto-optic shutters
Optical gyroscopes
Other devices based on surface and volumetric acoustic waves